Patent · US Active

Radiation detector, array of radiation detectors and method for manufacturing a radiation detector

US9829383B2 · kind B2 · utility

0Cited by

2References

24Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Dirk Weiler · Germering, DE
Kai-Marcel Muckensturm · Duisburg, DE
Frank Hochschulz · Ahaus, DE

Key dates

Filing date	Apr 29, 2016
Grant date	Nov 28, 2017
Priority date	—
Expiry date	Apr 29, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG01J2005/202
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A radiation detector with a substrate and a membrane, which is suspended above the substrate by a spacer is described, wherein the spacer thermally insulates a radiation sensor, which is formed in the membrane, from the substrate. Further, the spacer includes a first layer, which is electrically conducting and contacts a first pole of the radiation sensor and of the substrate, and a second layer, which is electrically conducting and electrically insulated from the first electrically conductive layer and contacts a second pole of the radiation sensor and of the substrate, wherein the second pole differs in polarity from the first pole.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.