High-temperature chip with high stability

US9829390B2 · kind B2 · utility

Assignee

• Heraeus Sensor Technology GmbH · DE

Inventors

• Karlheinz Wienand · Aschaffenburg, DE
• Matsvei Zinkevich · Goldbach, DE
• Margit Sander · Karlstein, DE

Key dates

• Filing date: Sep 23, 2013
• Grant date: Nov 28, 2017
• Expiry date: Jul 11, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01K2205/04
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to temperature sensors, in particular high-temperature sensors, having an optionally coated substrate, at least one resistor structure, and at least two connection contacts. The connection contacts electrically contact the resistor structure, and the substrate is made of zirconium oxide or a zirconium oxide ceramic stabilized with oxides of a trivalent metal and a pentavalent metal. The substrate is coated with an insulation layer and the resistor structure and the free regions of the insulation layer, on which no resistor structure is disposed, are at least partially coated with a ceramic intermediate layer. A protective layer and/or a cover is disposed on the ceramic intermediate layer. At least one electrode may be disposed, at least at one connection contact, alongside the resistor structure on the substrate. The invention also relates an exhaust-gas system for controlling and/or regulating an engine, particularly a motor vehicle engine, containing these temperature sensors.