Low frequency impedance measurement with source measure units
US9829520B2 · kind B2 · utility
2Cited by
4References
1Claims
0Family size
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Key dates
| Filing date | Aug 22, 2011 |
| Grant date | Nov 28, 2017 |
| Priority date | — |
| Expiry date | Jul 28, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring the impedance of a DUT having a capacitance of less than 1 pF includes applying a voltage or current signal to the DUT, the voltage or current signal including an AC component having a non-zero frequency of less than 1 kHz; monitoring a current or voltage signal, respectively, through the DUT in response to the voltage or current signal; digitizing the voltage signal and the current signal synchronously; and calculating the impedance from the digitized voltage and current signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.