Adjustable, deformable mirror for compensating irregularities of a beam
US9829702B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2015 |
| Grant date | Nov 28, 2017 |
| Priority date | — |
| Expiry date | Mar 10, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0825
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention relates to an adjustable, deformable mirror for compensating irregularities of a beam with a mirror element for reflecting incident rays of the beam, a base body for securing the mirror element and at least one actuating element for applying forces to the mirror element, wherein the mirror element is a planar element with a thickness of at least 1 mm, and the actuating element is a lever mechanism with lever elements. The invention also relates to a method for compensating irregularities of a beam as well as an optical arrangement with a mirror according to the invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.