Microfluidic devices for the generation of nano-vapor bubbles and their methods of manufacture and use
US9833780B2 · kind B2 · utility
0Cited by
3References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2015 |
| Grant date | Dec 5, 2017 |
| Priority date | — |
| Expiry date | Aug 19, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24496
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Microfluidic devices having superhydrophilic bi-porous interfaces are provided, along with their methods of formation. The device can include a substrate defining a microchannel formed between a pair of side walls and a bottom surface and a plurality of nanowires extending from each of the side walls and the bottom surface. For example, the nanowires can be silicon nanowires (e.g., pure silicon, silicon oxide, silicon carbide, etc., or mixtures thereof).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.