High-Q MEMS gyroscope
US9835454B2 · kind B2 · utility
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23Claims
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Key dates
| Filing date | Feb 9, 2015 |
| Grant date | Dec 5, 2017 |
| Priority date | — |
| Expiry date | Apr 2, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5776
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and/or method for efficiently operating a MEMS gyroscope without drive circuitry and/or with drive circuitry and a non-constant oscillating amplitude. In a non-limiting example, drive circuitry may be utilized to drive the MEMS gyroscope proof mass to a desired oscillating amplitude, and then the drive circuitry may be powered off. Rotational velocity may be sensed while the proof mass is being driven to a desired oscillating amplitude, while the proof mass is being maintained at a desired oscillating amplitude, and/or while the proof mass amplitude decays.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.