Pressure sensor having strain gauges disposed on a diaphragm
US9835508B2 · kind B2 · utility
1Cited by
3References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2013 |
| Grant date | Dec 5, 2017 |
| Priority date | — |
| Expiry date | Jul 5, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/065
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An object of the present invention is to realize a pressure sensor with a small variation in sensor characteristics. The pressure sensor includes a diaphragm having longitudinal and lateral sides, and four strain gauges disposed on the diaphragm. The four strain gauges are arranged at a center of the diaphragm. Two of the four strain gauges are arranged along a lateral direction, and other two strain gauges are arranged along a longitudinal direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.