Chemical sensor with protruded sensor surface
US9835585B2 · kind B2 · utility
2Cited by
291References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 5, 2014 |
| Grant date | Dec 5, 2017 |
| Priority date | — |
| Expiry date | Mar 5, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/4145
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A conductive element protrudes from the upper surface of the floating gate conductor into an opening. A dielectric material defines a reaction region. The reaction region overlies and extends below an upper surface of the conductive element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.