Patent · US Active

Sensors, methods of making and devices

US9835595B2 · kind B2 · utility

2Cited by

41References

13Claims

0Family size

Assignee

Qorvo US, Inc. · US

Inventors

James Russell Webster · Minnetonka, US
Peter J. Schiller · Gettorf, DE
Richard Allan Van Deusen · Windom, US
Ian Robert Harmon · Hudson, US

Key dates

Filing date	May 23, 2014
Grant date	Dec 5, 2017
Priority date	—
Expiry date	May 23, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/0426
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Disclosed sensors can include at least one resonator (in some embodiments, at least two resonators) and various other structures that may be formed in association with the resonators. The at least one resonator in embodiments can include a bottom electrode, a piezoelectric layer, and a top electrode, wherein the piezoelectric layer is positioned between the bottom electrode and the top electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.