Acceleration sensor and method for producing an acceleration sensor

US9835645B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Remigius Has · Grafenau, DE
• Mirko Hattass · Stuttgart, DE
• Frederik Ante · Stuttgart, DE

Key dates

• Filing date: Oct 17, 2013
• Grant date: Dec 5, 2017
• Expiry date: Aug 29, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P15/125
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor includes a circuit board with a recess that exposes a spring structure. The spring structure is formed from a material of the circuit board exposed by the recess and includes a vibrating element that is held in a resilient manner via at least one spring element. The sensor further includes a reference element connected rigidly to the circuit board and arranged at a distance from and opposite the vibrating element, an electrical circuit arranged on the vibrating element at a distance from the reference element, and at least one detection element. The circuit is configured to evaluate a signal that is configured to be influenced by a change in distance between the reference element and the at least one detection element in order to sense an acceleration of the acceleration sensor.