Cantilever type probe card for high frequency signal transmission
US9835651B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2015 |
| Grant date | Dec 5, 2017 |
| Priority date | — |
| Expiry date | Jun 14, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06772
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A high-frequency cantilever type probe card includes a base board, a probe base provided on the base board, two probes, and a capacitor having opposite ends electrically connected to the probes respectively. The probe base is made of an insulating material, and the probes are made of a conductive material. Each of the probes has an arm and a tip, wherein the arm is connected to the probe base, and the tip is adapted to contact a pad of a DUT. When the DUT generates a testing signal with a high frequency, and the testing signal is transmitted to one of the probes, the capacitor, and the other one of the probes in sequence, and then transmitted back to the DUT.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.