MEMS scanner with mirrors of different sizes
US9835853B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 26, 2014 |
| Grant date | Dec 5, 2017 |
| Priority date | — |
| Expiry date | Mar 23, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/085
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning device includes a base and a gimbal, mounted within the base so as to rotate relative to the base about a first axis. A first mirror, which has a first area, is mounted within the gimbal so as to rotate about a second axis, which is perpendicular to the first axis. A second mirror, which has a second area that is at least twice the first area, is also mounted within the gimbal so as to rotate about a third axis, which is parallel to the second axis, in synchronization with the first mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.