Patent · US Active

MEMS scanner with mirrors of different sizes

US9835853B1 · kind B1 · utility

12Cited by
23References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 26, 2014
Grant dateDec 5, 2017
Priority date
Expiry dateMar 23, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B26/085
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A scanning device includes a base and a gimbal, mounted within the base so as to rotate relative to the base about a first axis. A first mirror, which has a first area, is mounted within the gimbal so as to rotate about a second axis, which is perpendicular to the first axis. A second mirror, which has a second area that is at least twice the first area, is also mounted within the gimbal so as to rotate about a third axis, which is parallel to the second axis, in synchronization with the first mirror.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.