Gray-tone masks and the manufacturing method thereof

US9835939B2 · kind B2 · utility

Assignee

• TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED · CN

Inventors

• Zhuming Deng · Tangxia, CN
• Feng Zhao · Issaquah, US
• Chung-Yi Chiu · Baoshan, TW

Key dates

• Filing date: Jun 30, 2015
• Grant date: Dec 5, 2017
• Expiry date: Feb 26, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F1/50
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present disclosure relates to a gray-tone mask (GTM) and the manufacturing method thereof. The GTM includes at least one first light-blocking bar and at least on second light-blocking bar. A first gap is formed between any two adjacent first light-blocking bars. The second light-blocking bar is arranged within the first gap. The first gap includes a first crack being formed between adjacent first light-blocking bar and second light-blocking bar, wherein a length of the second light-blocking bar is “a”, a width of the first crack is “b”, and a ratio of the length of the second light-blocking bar (“a”) to the width of the first crack (“b”) satisfy the relationship: 0.9<a/b<1.1. In this way, the design scope is limited. Thus, a reasonable GTM design may be obtain and the experimental cost may be reduced.