Electrically conductive thin films
US9837179B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Nov 13, 2015 |
| Grant date | Dec 5, 2017 |
| Priority date | — |
| Expiry date | Jan 4, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02609
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electrically conductive thin film including: a material including a compound represented by Chemical Formula 1 and having a layered crystal structure,MemAa Chemical Formula 1wherein Me is Al, Ga, In, Si, Ge, Sn, A is S, Se, Te, or a combination thereof, and m and a each are independently a number selected so that the compound of Chemical Formula 1 is neutral; and
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