Surface chemical treatment apparatus for drawing predetermined pattern by carrying out a chemical treatment
US9839932B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 14, 2013 |
| Grant date | Dec 12, 2017 |
| Priority date | — |
| Expiry date | Feb 14, 2033 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23F1/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A surface chemical treatment apparatus provided with: a first conduit having an opening at one end and communicating with a liquid supply means at the other end; a second conduit having at one end an opening that surrounds the opening of the first conduit and communicating with a liquid suction means at the other end; and a moving mechanism for moving the openings of the first and second conduits relative to the solid phase surface, so as to make a surface chemical treatment possible in a fine pattern by allowing the patterning solution to be dispensed through the opening of the first conduit while allowing the solution to be suctioned up together with the surrounding liquid phase or gas phase medium through the opening of the second conduit that surrounds the opening of the first conduit and, thus, preventing seepage of the solution in all directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.