Measurement device for linear stage
US9841298B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 30, 2016 |
| Grant date | Dec 12, 2017 |
| Priority date | — |
| Expiry date | Dec 30, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/4255
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measurement device for a linear stage includes a two-dimensional grating and a measurement unit respectively disposed on first and second moving stages of the linear stage. The measurement unit includes a light source, a two-dimensional sensor and a processor. The light source emits incident light to the two-dimensional grating so that the incident light is reflected thereby to result in reflection light. The two-dimensional sensor receives the reflection light and converts the same to a reflection signal. The processor receives the reflection signal and determines accordingly a first rotational angle, and first and second displacement components of a displacement of the first moving stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.