Electrostatic chuck system and method of manufacturing organic light-emitting display apparatus by using the same
US9842781B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2015 |
| Grant date | Dec 12, 2017 |
| Priority date | — |
| Expiry date | Nov 26, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electrostatic chuck system includes an electrostatic chuck with a plurality of unit chucks supporting a display substrate, an optical photomask on the display substrate, the optical photomask having a material to be transferred onto the display substrate, a light source on the optical photomask, a gap measuring meter for measuring a gap between the display substrate and the optical photomask, a power source unit for applying power to each of the plurality of unit chucks through variable resistance units respectively connected to the plurality of unit chucks, and a control unit electrically connected to the gap measuring meter, the variable resistance units, and the power source unit, and transmits a signal for adjusting the gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.