Patent · US Active

Integrated circuits with laterally diffused metal oxide semiconductor structures and methods for fabricating the same

US9842903B2 · kind B2 · utility

4Cited by
0References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 20, 2014
Grant dateDec 12, 2017
Priority date
Expiry dateOct 18, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/516
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Integrated circuits with improved laterally diffused metal oxide semiconductor (LDMOS) structures, and methods of fabricating the same, are provided. An exemplary LDMOS integrated circuit includes an n-type reduced surface field, a p-type body well disposed on a lateral side of the n-type reduced surface field region, a shallow trench isolation structure disposed within the n-type reduced surface field region, and a gate structure disposed partially over the p-type body well, partially over the n-type reduced surface field region, partially over the shallow trench isolation structure, and partially within the shallow trench isolation structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.