Patent · US Active

Ring seal with sealing surface extension

US9845875B2 · kind B2 · utility

1Cited by
6References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 15, 2015
Grant dateDec 19, 2017
Priority date
Expiry dateMay 15, 2035

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF16J15/0893
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

A ring seal for sealing opposing flow component sealing surfaces defines a fluid flow path that is suitable for applications such as a semiconductor manufacturing modular gas delivery system. The ring seal includes an annular extension in the form of a modified “delta” extending from one or both sealing surfaces of the ring seal. The modified “delta” extends to an apex or point above the ring seal's sealing surface. First and second extension surfaces extend in opposite directions from the apex back toward the ring seal's sealing surface. In one aspect, the first extension surface defines a ridge where the slope of the first extension surface changes to decline faster to the ring seal's sealing surface. In another aspect, the apex is located within the annular extension closer to the axial hole than to an outer radial diameter of the annular seal body.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.