Pressure sensor with variable sense gap
US9846097B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 3, 2015 |
| Grant date | Dec 19, 2017 |
| Priority date | — |
| Expiry date | Feb 12, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor device includes a substrate having a port extending through it and a membrane including a first electrode spanning across the port. The port exposes the membrane to a pressure stimulus from an external environment. A second electrode is spaced apart from the first electrode by a gap having a first width. A control circuit applies an actuation voltage to move the second electrode closer to the first electrode and change the gap to a second width that is less than the first width. When the gap is set to the second width, the pressure sensor exhibits a greater sensitivity then when the gap is set to the first width. The membrane with the first electrode is movable in response to the pressure stimulus and the pressure stimulus is sensed as movement of the first electrode relative to the second electrode while the actuation voltage is applied.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.