Miniaturized integrated micro electo-mechanical systems (MEMS) optical sensor array for viscosity and mass detection
US9846115B2 · kind B2 · utility
3Cited by
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17Claims
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Key dates
| Filing date | Sep 9, 2013 |
| Grant date | Dec 19, 2017 |
| Priority date | — |
| Expiry date | Sep 9, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates generally to the field of chemical and biological sensors and in particular to micro electro-mechanical systems (MEMS) sensors for measuring fluid viscosity and detection of minute amounts of chemicals and biological agents in fluids. It is an object of the present invention to provide a sensor that will work in disposable cartridges with remote sensing that can measure dynamic changes of the functionalized cantilevers in liquid and gas environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.