Optical metrology system for spectral imaging of a sample
US9846122B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2016 |
| Grant date | Dec 19, 2017 |
| Priority date | — |
| Expiry date | Jun 9, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1053
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector collects the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector collects the broadband illumination reflected along the second illumination line. A signal collecting optic may collect the photoluminescence light and broadband light and focus it into a line, which is received by an optical conduit. The output end of the optical conduit has a shape that matches the entrance of the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.