Support apparatus for an optical device, optical device and lithography system
US9846370B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 2016 |
| Grant date | Dec 19, 2017 |
| Priority date | — |
| Expiry date | May 17, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70891
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A support device for an optical apparatus is disclosed. The support device includes first and second support elements. The support device also includes first and second flexure bearings. The first flexure bearing and the second flexure bearing each connect the first support element and the second support element to one another in a thermally conductive manner and hold the first support element in a manner movable in at least one first direction relative to the second support element. Spring forces generated by the first flexure bearing and the second flexure bearing partly or completely cancel one another out in the case of a movement of the first support element relative to the second support element in the first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.