Pressure sensor diaphragm
US9851272B2 · kind B2 · utility
0Cited by
21References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2015 |
| Grant date | Dec 26, 2017 |
| Priority date | — |
| Expiry date | Jul 7, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0044
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor includes a pre-formed diaphragm located at the distal end of a pressure sensor. The diaphragm has a convex surface on a first side of the diaphragm which is exposed to a fluid to be measured. A strain gauge is attached to a second surface on the opposite side of the diaphragm. The diaphragm may be deformed to have the convex curvature on the first surface, and heat treated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.