Circulating cooling/heating device
US9852888B2 · kind B2 · utility
3Cited by
4References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 7, 2013 |
| Grant date | Dec 26, 2017 |
| Priority date | — |
| Expiry date | Feb 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A circulating cooling/heating device that is configured to cool and heat a circulating fluid supplied to a chamber in plasma-etching equipment includes: a reservoir configured to store the circulating fluid; a pump configured to circulate the circulating fluid between the reservoir and the chamber; a heat exchanger configured to perform heat exchange between the circulating fluid and a cooling water, the heat exchanger being immersed in the circulating fluid stored in the reservoir; and a heater configured to heat the circulating fluid in the reservoir.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.