Spin dispenser module substrate surface protection system
US9855579B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2014 |
| Grant date | Jan 2, 2018 |
| Priority date | — |
| Expiry date | Aug 22, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D1/005
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A spin dispenser module and methods for using the same is disclosed. The spin dispenser module includes a cup having a basin with sidewalls and an exhaust, a rotatable platform situated inside the cup adapted for holding and rotating a substrate, a liquid dispenser disposed over the rotatable platform for dispensing a liquid coating material on top of the substrate, one or more ejector inlets disposed over the rotatable platform, the one or more ejectors connected to a negative pressure source, and a motor coupled to the rotatable platform to rate the rotatable platform at different rotational speeds. The one or more ejector inlets may be translatable and/or rotatable with optionally adjustable suction pressure. The ejector inlets operate after a liquid coating material is dispensed to avoid deposition of suspended organic compounds after a coating is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.