Proximity focus imaging interferometer
US9857223B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2015 |
| Grant date | Jan 2, 2018 |
| Priority date | — |
| Expiry date | Nov 20, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/2803
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometer system comprising an optical detector including a substrate and a two-dimensional array of pixels disposed on the substrate is provided. The interferometer system may further comprise an interferometer disposed proximate the optical detector without an optical element between the interferometer and the optical detector. The interferometer may include a first plate positioned proximate the substrate and extending over the two-dimensional array of pixels, a second plate spaced apart from the first plate, the first and second plates defining an optical gap between them, and at least one actuatable spacer positioned between the first plate and the second plate and configured to space apart the first and second plates from one another and to selectively alter a thickness of the optical gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.