Method of producing a Fresnel Zone Plate for applications in high energy radiation

US9859028B2 · kind B2 · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Gisela Schuetz · Wurmberg, DE
• Corinne Grevent · Esslingen am Neckar, DE
• Kahraman KESKINBORA · Stuttgart, DE
• Michael Hirscher · Stuttgart, DE

Key dates

• Filing date: Mar 7, 2013
• Grant date: Jan 2, 2018
• Expiry date: Jan 28, 2034

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49982
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

The invention concerns to a method of producing a Fresnel Zone Plate (1) for applications in high energy radiation including the following steps: supply of a substrate (2) transparent for high energy radiation, deposition of a layer (3) of a metal, a metal alloy or a metal compound on a planar surface (4) of the substrate (2), calculating a three dimensional geometrical profile (5) with a mathematical model, setting up a dosage profile (6) for an ion beam of the ion beam lithography inverse to the calculated three dimensional geometrical profile (5) and milling a three dimensional geometrical profile (5) with concentric zones into the layer (3) with ion beam lithography by means of focused ion beam.