Semiconductor device and method for manufacturing same
US9859316B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 1, 2015 |
| Grant date | Jan 2, 2018 |
| Priority date | — |
| Expiry date | Jun 1, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/811
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The present invention has an object of improving the operation stability of a semiconductor device that detects radiations without decreasing the yield thereof. A semiconductor device includes an active matrix substrate (50) including a plurality of TFTs (10) and a plurality of pixel electrode (20); a photoelectric conversion substrate (62) located to face the active matrix substrate (50); an upper electrode (64) provided on a surface of the photoelectric conversion substrate (62) opposite to the active matrix substrate (50); and a plurality of connection electrodes (72) provided between the active matrix substrate (50) and the photoelectric conversion substrate(62), the plurality of connection electrodes (72) being formed of metal material. Each of the plurality of connection electrodes (72) is in direct contact with any of the plurality of pixel electrodes (20) and with the photoelectric conversion substrate (62), overlaps a semiconductor layer (14) of any of the plurality of TFTs (10) as seen in a direction normal to the active matrix substrate (50), and contains a metal element having an atomic number of 42 or greater and 82 or smaller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.