Deposition apparatus and tray holder
US9861996B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2015 |
| Grant date | Jan 9, 2018 |
| Priority date | — |
| Expiry date | Mar 11, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68764
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A deposition apparatus includes a deposition source; a rotatable dome provided with an opening which covers the source; a first lever provided outside of the dome; and a tray holder including a frame including a first rotating member and a rotating part including a second rotating member and being attached to the frame such that the rotating part rotates with the second rotating member around an axis supported by the frame. The rotating part includes work-holding trays arranged around the axis, the tray holder is installed on the dome such that a side of one of the trays covers the opening, the first rotating member is rotated by the first lever during rotation of the dome, and the second rotating member is rotated with the rotating part by the first rotating member so as to change the tray a side of which covers the opening to another one.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.