Patent · US Active

Component having a substrate with cavities with micromechanical structures located therein

US9862596B2 · kind B2 · utility

0Cited by

0References

12Claims

0Family size

Assignee

Continental Teves AG & Co. OHG · DE

Inventors

Stefan Günthner · Frankfurt am Main, DE
Bernhard Schmid · Friedberg, DE

Key dates

Filing date	Nov 2, 2012
Grant date	Jan 9, 2018
Priority date	—
Expiry date	Dec 4, 2033

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0264
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A micromechanical component formed from, a substrate (100) having a first cavity (112) and a second cavity (113), a first micromechanical structure (117) arranged in the first cavity (112), and a second micromechanical structure (118) arranged in the second cavity (113). The first cavity (112) and the second cavities having respective first and second gas pressures having different values. The first gas pressure is provided by a closed configuration of the first cavity (112) and a first channel (115) opens into the second cavity (113), and the second gas pressure is adjustable via the first channel (115).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.