Laser beam deflection for targeted energy deposition

US9862597B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Mawuli Ametowobla · Stuttgart, DE
• Philip Kappe · Stuttgart, DE

Key dates

• Filing date: Dec 7, 2016
• Grant date: Jan 9, 2018
• Expiry date: Dec 7, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/16152
• WIPO field: Machine tools
• WIPO sector: Mechanical engineering

Abstract

A method for manufacturing a micromechanical component having a substrate and having a cap connected to the substrate and enclosing with the substrate a first cavity is provided, a first pressure existing, and a first gas mixture having a first chemical composition being enclosed, in the first cavity, in a first method step an access opening that connects the first cavity to an environment of the micromechanical component being constituted in the substrate or in the cap, in a second method step the first pressure and/or the first chemical composition being established in the first cavity, in a third method step the access opening being sealed with the aid of a laser by the introduction of energy or heat into an absorbing portion of the substrate or of the cap, the introduction of energy or heat being controlled by spatial displacement of a laser beam along a path proceeding substantially parallel to a surface, facing away from the first cavity, of the substrate or of the cap.