Pressure sensor having a ceramic platform

US9863830B2 · kind B2 · utility

Assignee

• ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

• Ulfert Drewes · Bad Hersfeld, DE
• Elke Schmidt · Bad Säckingen, DE
• Thomas Uehlin · Schopfheim, DE
• Andrea Berlinger · Baden-Baden, DE

Key dates

• Filing date: Dec 18, 2014
• Grant date: Jan 9, 2018
• Expiry date: Dec 18, 2034

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C04B2237/72
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor, including a platform of ceramic, a measuring membrane arranged on the platform, a pressure measuring chamber enclosed in the platform under the measuring membrane, and at least one metal body connected with the platform via a pressure-tight, preferably elastomer free, mechanical connection. Thermomechanical stresses arising from the connection are reduced by features including that the pressure-tight, mechanical connection occurs via an adapting body arranged between the platform and the metal body. The adapting body has a thermal expansion coefficient, which rises in direction (z) extending from the platform to the metal body from a coefficient of expansion corresponding to a thermal coefficient of expansion of the ceramic of the platform to a coefficient of expansion corresponding to the thermal coefficient of expansion of the metal body, and the adapting body is connected by a first joint with the platform and by a second joint with the metal body.