Method for imaging nanostructures with optical microscopy
US9863856B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jan 23, 2015 |
| Grant date | Jan 9, 2018 |
| Priority date | — |
| Expiry date | May 3, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for observing nanostructures by optical microscopy is provided. Firstly, a sample with a nanostructure and a vapor-condensation-assisted optical microscopy system are provided. The vapor-condensation-assisted optical microscopy system comprises a vapor-condensation-assisted device and an optical microscope comprising a stage. The vapor-condensation-assisted device is used to provide a vapor to sample on the stage in application. Secondly, locating the sample is located on the stage. Thirdly, a vapor is applied to the sample to observe the sample via the optical microscopy system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.