Condensation sensor systems and methods
US9863903B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Aug 1, 2013 |
| Grant date | Jan 9, 2018 |
| Priority date | — |
| Expiry date | Aug 1, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02631
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Condensation sensor systems and methods are described herein. Methods for forming a condensation sensor can include depositing a III-nitride on a substrate via sputtering, and implementing conductive contacts on the deposited III-nitride via a shadow mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.