Process for producing structured coatings

US9865461B2 · kind B2 · utility

Assignee

• EVONIK DEGUSSA GMBH · DE

Inventors

• Christoph Mader · Munster, DE
• Paul Henrich Woebkenberg · Grevenbroich, DE
• Joachim Erz · Schwörstadt, DE
• Stephan Traut · Haltern am See, DE
• Matthias Patz · Heverlee, BE
• Michael Coelle · Schwanstetten, DE
• Stephan Wieber · Karlsruhe, DE
• Patrik Stenner · Hanau, DE
• Janette Klatt · Recklinghausen, DE
• Odo Wunnicke · Dresden, DE

Key dates

• Filing date: Jun 6, 2014
• Grant date: Jan 9, 2018
• Expiry date: Jun 6, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02532
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The present invention relates to a liquid-phase process for producing structured silicon- and/or germanium-containing coatings by the application to a substrate of at least one coating composition, the partial activation of the resulting coating on the coated substrate, and oxidation of non-activated coating on the substrate, to the coats produced by the process and to their use.