Substrate storage container
US9865487B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 11, 2013 |
| Grant date | Jan 9, 2018 |
| Priority date | — |
| Expiry date | Jan 12, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65D2585/86
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate storing container that stores substrates composed of semiconductor wafers includes: a locked portion that is arranged at a center portion of an upper wall and is locked by a lifting member that can lift a container main body; in which the locked portion includes a plate-like flange portion having a lower face that faces the upper wall and an elastically deformable elastic member provided at a lower face of the flange portion and/or at a rim portion of the flange portion; and in which the locked portion is locked by the lifting member in a state in which the elastic member is sandwiched between the flange portion and the lifting member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.