Ultraviolet photodetectors and methods of making ultraviolet photodetectors
US9865766B2 · kind B2 · utility
0Cited by
23References
35Claims
0Family size
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Key dates
| Filing date | Jul 22, 2016 |
| Grant date | Jan 9, 2018 |
| Priority date | — |
| Expiry date | Jul 22, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J1/429
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of making an ultraviolet sensor includes applying a metal-containing solution to a substrate using a spin coating technique to form a metal-containing coat. The metal-containing coat is baked and pyrolyzed to form a metal-containing oxide film on the substrate. The metal-containing oxide film has a cubic crystalline structure suitable for ultraviolet photodetectors in flame detection applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.