Multiple coil spring MEMS resonator
US9866200B2 · kind B2 · utility
1Cited by
29References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 2015 |
| Grant date | Jan 9, 2018 |
| Priority date | — |
| Expiry date | Nov 2, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A multiple coil spring MEMS resonator includes a center anchor and a resonator body including two or more coil springs extending in a spiral pattern from the center anchor to an outer closed ring. Each pair of coil springs originates from opposing points on the center anchor and extends in the spiral pattern to opposing points on the outer ring. The number of coil springs, the length and the width of the coil springs and the weight of the outer ring are selected to realize a desired resonant frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.