Pillar array structure with uniform and high aspect ratio nanometer gaps
US9868119B2 · kind B2 · utility
8Cited by
1References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 24, 2015 |
| Grant date | Jan 16, 2018 |
| Priority date | — |
| Expiry date | Oct 14, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1028
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A technique related to sorting entities is provided. An inlet is configured to receive a fluid, and an outlet is configured to exit the fluid. A nanopillar array, connected to the inlet and the outlet, is configured to allow the fluid to flow from the inlet to the outlet. The nanopillar array includes nanopillars arranged to separate entities by size. The nanopillars are arranged to have a gap separating one nanopillar from another nanopillar. The gap is constructed to be in a nanoscale range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.