Hard material layers with selected thermal conductivity

US9869015B2 · kind B2 · utility

Assignees

• Oerlikon Surface Solutions AG, Pfäffikon · CH
• ETH ZËRICH · CH
• EMPA · CH

Inventors

• Matthias Lukas Sobiech · Günzburg, DE
• Sebastian Stein · Achern, DE
• Paul Heinrich Böttger · Bellinzona, CH
• Valery Shklover · Zürich, CH
• Jörg Patscheider · Meilen, CH

Key dates

• Filing date: Mar 26, 2014
• Grant date: Jan 16, 2018
• Expiry date: Jul 4, 2034

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B23B2228/10
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A hard material layer system with a multilayer structure, comprising alternating layers A and B, with A layers having the composition MeApAOnANmA in atomic percent and B layers having the composition MeBpBOnBNmB in atomic percent, where the thermal conductivity of the A layers is greater than the thermal conductivity of the B layers. MeA and MeB each comprise at least one metal of the group Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, and Al, pA indicates the atomic percentage of MeA and pB indicates the atomic percentage of MeB and the following is true: PA=PB, nA indicates the oxygen concentration in the A layers in atomic percent and nB indicates the oxygen concentration in the B layers in atomic percent and the following is true: nA<nB, and mA indicates the nitrogen concentration in the A layers in atomic percent and mB indicates the nitrogen concentration in the B layers in atomic percent and the following is true: pA/(nA+mA)=pB/(nB+mB).