Patent · US Active

Composition for metal plating comprising suppressing agent for void free submicron feature filling

US9869029B2 · kind B2 · utility

3Cited by
5References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 16, 2010
Grant dateJan 16, 2018
Priority date
Expiry dateJul 25, 2031

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05K3/42
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

According to the present invention a composition is provided comprising at least one source of metal ions and at least one additive obtainable by reacting a) a polyhydric alcohol condensate compound derived from at least one polyalcohol of formula (I)X(OH)n  (I)by condensation with b) at least one alkylene oxide to form a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein n is an integer from 3 to 6 and X is an n-valent linear or branched aliphatic or cycloaliphatic radical having from 2 to 10 carbon atoms, which may be substituted or unsubstituted.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.