Detection device with suspended bolometric membranes having a high absorption efficiency and signal-to-noise ratio
US9869593B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2016 |
| Grant date | Jan 16, 2018 |
| Priority date | — |
| Expiry date | Nov 18, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/103
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.