Li-containing oxide target assembly
US9870902B2 · kind B2 · utility
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1References
17Claims
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Assignee
Inventors
Key dates
| Filing date | Apr 28, 2014 |
| Grant date | Jan 16, 2018 |
| Priority date | — |
| Expiry date | Apr 28, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2237/407
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is a target assembly which is manufactured by bonding a Li-containing oxide sputtering target and an Al-based or Cu-based backing plate through a bonding material. The Li-containing oxide target assembly does not undergo warping or cracking during the bonding. The Li-containing oxide target assembly according to the present invention is manufactured by bonding a Li-containing oxide sputtering target to a backing plate via a bonding material, and has bending strength of 20 MPa or larger.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.