Fluorenyl β-oxime ester compounds, photopolymerization initiator and photoresist composition containing the same
US9873663B2 · kind B2 · utility
4Cited by
1References
10Claims
0Family size
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Key dates
| Filing date | Jan 19, 2015 |
| Grant date | Jan 23, 2018 |
| Priority date | — |
| Expiry date | Jan 19, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07C2603/18
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a novel β-oximester fluorene derivative compound, a photopolymerization initiator comprising the same, and a photoresist composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.