Method and structure for integrating photonics with CMOs

US9874693B2 · kind B2 · utility

Assignee

• The Research Foundation for The State University of New York · US

Inventors

• Christopher V. Baiocco · Newburgh, US
• Douglas D. Coolbaugh · Highland, US
• Gerald L. Leake · Albany, US

Key dates

• Filing date: Jun 10, 2015
• Grant date: Jan 23, 2018
• Expiry date: Jun 10, 2035

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/021
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A semiconductor structure can include an active device FET region having a FET and a photonics region having a photonic device including a waveguide. A semiconductor structure can include an active device FET region having a FET and a trench isolation region having a photonic device that includes a waveguide. A method can include forming a FET at an active device FET region of a semiconductor structure. A method can include forming a photonic device at a trench isolation region of a semiconductor structure.