Optical image capturing module, alignment method, and observation method
US9874807B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 3, 2013 |
| Grant date | Jan 23, 2018 |
| Priority date | — |
| Expiry date | Dec 3, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B2215/0582
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical image capturing module and an alignment method and an observation method for an upper substrate and a lower substrate using the optical image capturing module are provided. The upper substrate and the lower substrate are disposed opposite. The alignment method includes the following steps of: emitting a light ray; filtering the light ray and dividing the light ray into a light ray at first wavelength and a light ray at second wavelength, whereby the light ray at first wavelength irradiates a pattern on the upper substrate, and the light ray at second wavelength irradiates a pattern on the lower substrate; reflecting the pattern on the upper substrate to an image capturing device; reflecting the pattern on the lower substrate to the image capturing device; and determining the positions of the pattern on the upper substrate and the pattern on the lower substrate on the image capturing device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.