Device for controlling the direction of a laser beam
US9878400B1 · kind B1 · utility
4Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 22, 2014 |
| Grant date | Jan 30, 2018 |
| Priority date | — |
| Expiry date | Mar 16, 2036 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/54
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser system is configured to form laser-induced channels in a substrate at a plurality of spaced apart locations along a process path. The laser system includes a laser delivery assembly that receives the laser beam along a receiving axis and directs the laser beam toward the substrate along an impingement axis that forms an oblique angle with a surface of the substrate. The substrate can be divided into separate first and second portions along a separation surface having a draft angle, thereby facilitating substrate division with a zero-kerf process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.