Apparatus and method of manufacturing radiation detection panel
US9880292B2 · kind B2 · utility
2Cited by
1References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 11, 2014 |
| Grant date | Jan 30, 2018 |
| Priority date | — |
| Expiry date | Jan 6, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/202
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
According to one embodiment, an apparatus of manufacturing a radiation detection panel, includes an evaporation source configured to evaporate a scintillator material and emit the scintillator material vertically upward, a holding mechanism located vertically above the evaporation source, and holding a photoelectric conversion substrate, and a heat conductor arranged opposite to the holding mechanism with a gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.