Patent · US Active

Multiple wavelengths real time phase shift interference microscopy

US9880377B1 · kind B1 · utility

16Cited by
3References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 9, 2016
Grant dateJan 30, 2018
Priority date
Expiry dateSep 9, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B27/286
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A system microscopy system and method that enable obtaining high resolution 3D images in a single shot are presented. The system is an ultra-high speed, real time multi wavelength phase shift interference microscopy system that uses three synchronized color CCD cameras. Each CCD is equipped with a precision achromatic phase mask which in turn allows obtaining π/2 phase shifted signals in three different wavelengths simultaneously.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.